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METHOD AND SYSTEM FOR GERMANIUM-ON-SILICON PHOTODETECTORS WITHOUT GERMANIUM LAYER CONTACTS
METHOD AND SYSTEM FOR GERMANIUM-ON-SILICON PHOTODETECTORS WITHOUT GERMANIUM LAYER CONTACTS
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机译:无锗层接触的硅基锗光电探测器的方法和系统
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摘要
Methods and systems for germanium-on-silicon photodetectors without germanium layer contacts are disclosed and may include, in a semiconductor die having a photodetector, where the photodetector includes an n-type silicon layer, a germanium layer, a p-type silicon layer, and a metal contact on each of the n-type silicon layer and the p-type silicon layer: receiving an optical signal, absorbing the optical signal in the germanium layer, generating an electrical signal from the absorbed optical signal, and communicating the electrical signal out of the photodetector via the n-type silicon layer and the p-type silicon layer. The photodetector may include a horizontal or vertical junction double heterostructure where the germanium layer is above the n-type and p-type silicon layers. An intrinsically-doped silicon layer may be below the germanium layer between the n-type silicon layer and the p-type silicon layer. A top portion of the germanium layer may be p-doped.
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