首页> 外国专利> METHOD AND SYSTEM FOR GERMANIUM-ON-SILICON PHOTODETECTORS WITHOUT GERMANIUM LAYER CONTACTS

METHOD AND SYSTEM FOR GERMANIUM-ON-SILICON PHOTODETECTORS WITHOUT GERMANIUM LAYER CONTACTS

机译:无锗层接触的硅基锗光电探测器的方法和系统

摘要

Methods and systems for germanium-on-silicon photodetectors without germanium layer contacts are disclosed and may include, in a semiconductor die having a photodetector, where the photodetector includes an n-type silicon layer, a germanium layer, a p-type silicon layer, and a metal contact on each of the n-type silicon layer and the p-type silicon layer: receiving an optical signal, absorbing the optical signal in the germanium layer, generating an electrical signal from the absorbed optical signal, and communicating the electrical signal out of the photodetector via the n-type silicon layer and the p-type silicon layer. The photodetector may include a horizontal or vertical junction double heterostructure where the germanium layer is above the n-type and p-type silicon layers. An intrinsically-doped silicon layer may be below the germanium layer between the n-type silicon layer and the p-type silicon layer. A top portion of the germanium layer may be p-doped.
机译:公开了用于不具有锗层接触的硅上锗光电探测器的方法和系统,其可以包括在具有光电探测器的半导体管芯中,其中光电探测器包括n型硅层,锗层,p型硅层,以及在n型硅层和p型硅层的每一个上的金属触点:接收光信号,吸收锗层中的光信号,从吸收的光信号中产生电信号,并传递电信号。通过n型硅层和p型硅层从光电检测器中取出。光电检测器可以包括水平或垂直结双异质结构,其中锗层在n型和p型硅层上方。本征掺杂的硅层可以在n型硅层和p型硅层之间的锗层下方。锗层的顶部可以是p掺杂的。

著录项

  • 公开/公告号EP3029728A1

    专利类型

  • 公开/公告日2016-06-08

    原文格式PDF

  • 申请/专利权人 LUXTERA INC.;

    申请/专利号EP20150196803

  • 申请日2015-11-27

  • 分类号H01L27;H01L31/0687;H01L31/072;H01L31/0725;G02B6/12;

  • 国家 EP

  • 入库时间 2022-08-21 14:48:17

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