ELECTROMAGNETIC INDUCTION TYPE POSITION DETECTOR AND ELECTROMAGNETIC INDUCTION TYPE POSITION DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electromagnetic induction type position detector capable of reducing detection errors by cancelling primary and secondary interferences, and an electromagnetic induction type position detection method.SOLUTION: The electromagnetic induction type position detector has: slider coils 11a-11c each of which is formed with a prescribed pitch p and to each of which a magnetic flux is generated by supplying an AC current to each of them; a slider 10 in which, with respect to the slider coil 11a, the slider coil 11b is positioned to be shifted by p/3 and the slider coil 11c is positioned to be shifted by 2p/3; a scale 20 with a scale coil 21 arranged to face the slider coils 11a-11c, formed with a prescribed pitch p, in which an induction voltage is inducted by electromagnetic induction due to magnetic flux of each slider coil; and a detection device 30 for detecting a position of the slider 10 with respect to the scale 20 on the basis of the induction voltage.SELECTED DRAWING: Figure 1