INDUCTIVE COUPLING PLASMA GENERATOR AND INDUCTIVE COUPLING PLASMA ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an inductive coupling plasma generator capable of highly effectively cooling a high frequency inductive coil without using cooling water, and to provide an inductive coupling plasma analyzer using the same.SOLUTION: An inductive coupling plasma generator 10 roughly comprises a plasma torch 13, a high frequency inductive coil 14, and a high frequency power supply 16. The inductive coupling plasma generator 10 is also provided with a heat transfer member 18 having a first end 18a coupled to the high frequency inductive coil 14 and a second end 18b coupled to a cooling block 17. Having the second end 18b of the heat transfer member 18 positioned above the first end 18a thereof allows gravity to drop concentrated operating liquid down to the first end 18a, which enhances circulation and mobility of the operating liquid, resulting in higher cooling capability.SELECTED DRAWING: Figure 1