FILM DEPOSITION APPARATUS FOR CUTTING TOOL WITH COATING FILM, FILM DEPOSITION METHOD FOR COATING FILM FOR CUTTING TOOL

摘要

PROBLEM TO BE SOLVED: To provide a film deposition apparatus for a cutting tool with a coating film, the apparatus being capable of depositing a coating film under a suitable temperature condition.SOLUTION: The film deposition apparatus for a cutting tool with a coating film is an inline film deposition apparatus 100 which comprises: a film deposition chamber 12 for depositing a coating film on a cutting tool W; a pre-processing chamber 11 and a post-processing chamber 13 connected to the film deposition chamber 12 via vacuum valves 52, 53, respectively; and a conveyance path for conveying the cutting tool W from the pre-processing chamber 11 to the post-processing chamber 13 through the film deposition chamber 12, and which film deposition apparatus uses a conveyance carrier 80 in which a plurality of rods 82 for supporting the cutting tool W are arranged upright in the conveyance direction. The film deposition chamber 12 comprises: a film deposition region D where the coating film is deposited on the cutting tool W; a conveyance apparatus 31 for causing the conveyance carrier 80 to pass through the film deposition region D while conveying the conveyance carrier along the conveyance path; a heating region H which is arranged adjacent to the film deposition region D in the carrier conveyance direction, and heats the cutting tool W; and a carrier standby region C1 for receiving the conveyance carrier 80, provided between the film deposition region D and at least one vacuum valve 53 of the vacuum valves.