MANUFACTURING METHOD FOR FLUORESCENT LIGHT SOURCE LIGHT-EMITTING ELEMENT, AND FLUORESCENT LIGHT SOURCE LIGHT-EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a fluorescent light source light-emitting element and the fluorescent light source light-emitting element, capable of forming, at a low cost, an accurate photonic structure on a surface to be a fluorescent light-emitting surface.SOLUTION: A manufacturing method for a fluorescent light source light-emitting element includes: a step of forming a photosensitive material layer on a fluorescent substrate surface or a functional material layer surface; a step of generating interference light in which longer directions of interference fringes cross at a predetermined angle by crossing, at a predetermined interference angle, beams of light obtained by dividing output light of a coherent light source into two or more, to perform an interference exposure on the photosensitive material layer by using the interference light; a step of removing an area irradiated with the interference light or a non-irradiated area of the photosensitive material layer after the interference exposure, to form a micro pattern on the photosensitive material layer; and a step of performing etching on the fluorescent substrate or the functional material layer by using the micro pattern on the photosensitive material layer, to obtain a photonic structure.SELECTED DRAWING: Figure 1