首页> 外国专利> OXIME SULFONATE COMPOUND, PHOTOACID GENERATOR, RESIST COMPOSITION, CATIONIC POLYMERIZATION INITIATOR, AND CATIONIC POLYMERIZABLE COMPOSITION

OXIME SULFONATE COMPOUND, PHOTOACID GENERATOR, RESIST COMPOSITION, CATIONIC POLYMERIZATION INITIATOR, AND CATIONIC POLYMERIZABLE COMPOSITION

机译:环氧磺酸盐化合物,光酸发生剂,抗蚀剂组成,阳离子聚合引发剂和阳离子可聚合组成

摘要

PROBLEM TO BE SOLVED: To provide an oxime sulfonate compound useful as a photoacid generator and a cationic polymerization initiator, and provide a photoacid generator, a resist composition, a cationic polymerization initiator, and a cationic polymerizable composition.SOLUTION: The present invention provides an oxime sulfonate compound represented by the general formula (I), where Ris a straight, cyclic or branched alkyl group having 4 or more carbon atoms, and Ris a group such as an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an aryl group having 6 to 20 carbon atoms and the like.SELECTED DRAWING: Figure 1
机译:解决的问题:提供一种用作光酸产生剂和阳离子聚合引发剂的肟磺酸盐化合物,并提供一种光酸产生剂,抗蚀剂组合物,阳离子聚合引发剂和阳离子可聚合组合物。由通式(I)表示的肟磺酸酯化合物,其中Ris为具有4个或更多个碳原子的直链,环状或支链烷基,且Ris为诸如具有1至18个碳原子的脂族烃基的基团, 6至20个碳原子等。图1

著录项

  • 公开/公告号JP2016169173A

    专利类型

  • 公开/公告日2016-09-23

    原文格式PDF

  • 申请/专利权人 ADEKA CORP;

    申请/专利号JP20150048779

  • 申请日2015-03-11

  • 分类号C07C309;C09K3;C08G59/68;G03F7/004;G03F7/039;

  • 国家 JP

  • 入库时间 2022-08-21 14:46:02

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