Method for vertical alignment of block copolymers nanodomains using random or gradient copolymers of monomers that are at least partially different from the monomers present in each block of the block copolymer

摘要

A block copolymer nanodomain vertical alignment method using random or gradient copolymers of monomers that are at least partially different from the monomers present in each block of the block copolymer. The present invention relates to a process for vertical alignment of block copolymer nanodomains on a substrate by using a random copolymer or gradient copolymer sublayer of a monomer that is at least partially different from the monomer present in each block of the block copolymer. About. [Selection figure] None