SPACE TRANSFORMER AND METHOD OF MANUFACTURING THE SAME, AND PROBE CARD INCLUDING SPACE TRANSFORMER

摘要

PROBLEM TO BE SOLVED: To provide a probe card, more specifically, to provide a space transformer and a method of manufacturing the same, and a probe card including a space transformer.SOLUTION: A space transformer is provided. The space transformer is constituted of a plurality of ceramic layers laminated while interposing a fine wiring pattern layer therebetween, and each ceramic layer includes a ceramic substrate having a plurality of reference vias penetrating the same, and an alignment key arranged on the outline of the ceramic substrate adjacent, respectively, to the reference vias of the outermost ceramic layer in the upper surface direction of the ceramic substrate, out of the ceramic layer, and partially elongating next ceramic layer while penetrating the outermost ceramic layer.SELECTED DRAWING: Figure 5