INTERNAL SHAPE EXAMINING SENSOR UNIT, AND INTERNAL SHAPE EXAMINING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an internal shape examining sensor unit and an internal shape examining device that reduce dead angles in measurement.;SOLUTION: A sensor unit 10 for internal shape examination of a hole 71 formed in an examination object 70 is equipped with a parallel ring laser beam generator 18 that emits a parallel ring laser beam; a half mirror unit 14 that reflects or transmits the parallel ring laser beam; a light guide 15 that receives at one end incidence of the parallel ring laser beam from the half mirror unit and guides the beam to the other end, and accepts from the other end a reflected beam from the inside of the hole and emits it to the half mirror unit 14; and an image pickup unit 16 that receives the reflected beam transmitted or reflected by the half mirror unit. An internal shape examining device equipped with the sensor unit is also provided.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2016,JPO&INPIT