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Apparatus having a vacuum pump, and were placed in a vacuum pump, a method for correcting a magnetic field of at least one component for generating interference field
Apparatus having a vacuum pump, and were placed in a vacuum pump, a method for correcting a magnetic field of at least one component for generating interference field
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机译：一种具有真空泵的装置，并置于真空泵中，该方法用于校正至少一个分量的磁场以产生干扰场
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摘要
An arrangement includes a vacuum pump having a rotor, and a drive unit for driving the rotor and having at least one magnetic interference field-generating component and at least one compensation coil for compensating the magnetic interference field generated by the at least one component.
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