TERAHERTZ WAVE MICROSCOPE AND FOCUS CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a terahertz wave microscope capable of increasing observation accuracy, and a focus control method.;SOLUTION: A terahertz wave microscope comprises a support unit, a light source, an optical mechanism, and a control mechanism. The support unit supports an observation object. The light source generates excitation light. The optical mechanism is configured so that a terahertz wave generated from the observation object is detected by irradiating the observation object with excitation light. The control mechanism is configured so as to measure a focus error of the observation object supported by the support unit. The control mechanism is also configured so that the optical mechanism is focused on the observation target position on the basis of the measurement information, and relative movement of the support unit and the optical mechanism is controlled.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2017,JPO&INPIT