Manganese-containing compounds, their use in the deposition of the synthetic and manganese-containing film

摘要

manganese-containing compound, to disclose the use of the deposition of the synthesis and manganese-containing film. Manganese-containing compounds disclosed in formula (the I), having the formula (II): 1] (In the formula, R1, R2 and R3 each independently hydrogen or a linear, are selected from cyclic or branched hydrocarbon that, provided R1, R2 and R3 are C3~C4 hydrocarbon group in the case of R1 = R2 = R3, each independently linear R4 and R5, are selected from cyclic or branched hydrocarbon group) . .BACKGROUND