Particle classifier measuring device, a sample producing apparatus particle concentration distribution is uniform, and nanoparticle film deposition apparatus

摘要

charger is arranged in the sample gas flowing through the inside of the inlet side of the parallel flow paths which can be a laminar flow, charger charges the particles in the sample gas includes a discharge electrode. On one side of the pair of opposed faces of the flow path, downstream to one or more of the suction-side electrode of the charger is disposed at different distances of the position from the inlet flow path along the flow path direction there. Classification electrode is disposed on the other surface of the pair of opposed faces of the flow path. Classifying electrodes are arranged opposite to the suction-side electrode to generate an electric field to attract the charged particulates in the sample gas flowing through a flow path between the suction-side electrode on the suction side electrode side.