Droplet generator, EUV radiation source, a lithographic apparatus, a method and a device manufacturing method for generating droplets

摘要

droplet generator for EUV radiation sources, in use, is configured to drive the tubules molten material flows, and an actuator configured to adjust the pressure inside the capillary, the actuator drive frequency comprising a controller, a droplet generator, in use, configured so that the driving frequency is or becomes substantially equal to equal to the main resonance frequency of the molten material in the capillary.FIELD 7