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OPTICAL SCANNING OBSERVATION APPARATUS AND ADJUSTMENT METHOD FOR PULSED LASER BEAM IRRADIATION PARAMETER
OPTICAL SCANNING OBSERVATION APPARATUS AND ADJUSTMENT METHOD FOR PULSED LASER BEAM IRRADIATION PARAMETER
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机译:脉冲激光束辐照参数的光学扫描观测装置及调整方法
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摘要
PROBLEM TO BE SOLVED: To provide an optical scanning observation apparatus capable of suppressing color leakage and also to provide an adjustment method for a pulsed laser beam irradiation parameter.SOLUTION: The optical scanning observation apparatus according to the present invention, comprises: a laser beam source drive unit for causing a plurality of laser beam sources to sequentially emit a pulsed laser beam with a different wavelength; a scanning unit for projecting the pulsed laser beam onto a target object and causing the pulsed laser beam to scan the target object; a laser beam detection unit for sequentially detecting light generated from the target object by sequential irradiation of the pulsed laser beam; an image processing unit for creating an image of the target object on the basis of detection signals output from the laser beam detection unit; and a control unit for controlling the laser beam source drive unit such that a detection signal output by the laser beam detection unit in response to irradiation of a pulsed laser beam with one wavelength is not substantially mixed with a detection signal output by the laser beam detection unit in response to irradiation of a pulsed laser beam with another wavelength.SELECTED DRAWING: Figure 1
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