Design and control of multi-temperature micro oven for MEMS device

摘要

A generator of an output signal having a desired frequency, micro ovens, including a MEMS oscillator (micro-oven), and a temperature control system for maintaining the desired operating temperature of MEMS oscillator in accordance with the temperature setting signal, and a control unit for generating a temperature setting signal. The control unit is provided for the plurality of temperatures, based on the parameter set is received, and characterized in advance, selecting the operating temperature of MEMS oscillator.