Microchannel plate, a method of manufacturing a micro channel plate, and an image intensifier

摘要

PROBLEM TO BE SOLVED: To provide a michrochannel plate capable of enhancing the life characteristics by suppressing ion feedback, and to provide a method of manufacturing michrochannel plate, and an image intensifier.;SOLUTION: A michrochannel plate 4 becomes a thin and strong film because an electron emission film 36 and an ion barrier film 37 are formed integrally on a substrate 31 by the same deposition step. Furthermore, ion feedback is suppressed by removing an organic film on the ion barrier film 37 until the ion barrier film 37 is exposed.;COPYRIGHT: (C)2014,JPO&INPIT