HIGH FREQUENCY CONDUCTIVITY MEASUREMENT DEVICE AND HIGH FREQUENCY CONDUCTIVITY MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a high frequency conductivity measurement device and a high frequency conductivity measurement method which can easily measure the conductivity of a conductor plate to be measured at a high frequency.;SOLUTION: A high frequency conductivity measurement device 1 has a first resonator 2 that induces a first resonance mode, and a second resonator 3 that has a conductive plate to be measured 5 between the second resonator 3 and the first resonator 2, and induces a second resonance mode different from the first resonance mode. The first resonance mode and second resonance mode are measured at the same time.;COPYRIGHT: (C)2016,JPO&INPIT