The method of manufacturing the polarization inversion element, the manufacturing method and the waveguide type wavelength conversion device of the waveguide type wavelength converting element

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a polarization reversal element capable of controlling a width of a polarization reversal area with high accuracy, a manufacturing method of a waveguide type wavelength conversion element, and the waveguide type wavelength conversion element.;SOLUTION: A manufacturing method of a polarization reversal element includes the steps of: forming a comb electrode 2 on one surface 1a of a ferroelectric crystal substrate 1; forming an ion conductive oxide film 3 on another surface 1b facing the one surface 1a of the ferroelectric crystal substrate 1; forming a plane electrode 4 on the ion conductive oxide film 3; and forming a plurality of polarization reversal areas 5 from the one surface 1a to the other surface 1b on a part of the ferroelectric crystal substrate 1 directly below the comb electrode 2 by applying voltage between the comb electrode 2 and the plane electrode 4 via the ion conductive oxide film 3.;COPYRIGHT: (C)2014,JPO&INPIT