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Plasma excitation method and system in capacitively coupled reactor with trapezoidal waveform excitation
Plasma excitation method and system in capacitively coupled reactor with trapezoidal waveform excitation
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机译:具有梯形波形激励的电容耦合电抗器中的等离子体激励方法和系统
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摘要
The invention concerns a method for exciting at least one electrode of a capacitively coupled reactive plasma reactor containing a substrate. The electrode is excited by applying a RF voltage with a trapezoidal waveform comprising a ramp-up, a high plateau, a ramp-down and a low plateau. The plasma density can be controlled by adjusting the duration of the ramp-up, the duration of the ramp-down, the amplitude and the repetition rate of the trapezoidal waveform. The ion energy distribution function at the substrate can be controlled by adjusting the amplitude and the relative duration between the high plateau and the low plateau of the trapezoidal waveform.
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