Photo diode, wavelength sensors, wavelength measuring device

摘要

PROBLEM TO BE SOLVED: To provide a photodiode, a wavelength sensor and a wavelength measuring apparatus, which can improve sensitivity while reducing an optical density of incident light on the photodiode.;SOLUTION: A photodiode 10 according to a present embodiment comprises: a substrate 30; a light-receiving layer 36 formed on the substrate 30; a semiconductor layer 38 formed on the light-receiving layer 36; a two-dimensional diffraction grating 38a for diffracting light perpendicularly incident on the semiconductor layer 38 to make light guided in the light-receiving layer 36; and reflection films 16, 18 respectively formed on ends of the light-receiving layer 36 for reflecting light which is guided in the light-receiving layer 36.;COPYRIGHT: (C)2013,JPO&INPIT