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Method of manufacturing the light source of the light source of the manufacturing equipment and particle detection apparatus of the particle detection equipment
Method of manufacturing the light source of the light source of the manufacturing equipment and particle detection apparatus of the particle detection equipment
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机译:制造设备的光源的光源的制造方法以及颗粒检测设备的颗粒检测设备
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摘要
PROBLEM TO BE SOLVED: To provide a device for manufacturing a light source of a particle detection device capable of manufacturing an optical type particle detection device having less erroneous detection.;SOLUTION: A device for manufacturing a light source of a particle detection device includes: an element holding part 61 for holding a light source element 1; a pedestal holding part 62 for holding a pedestal 2 to which the light source element 1 is attached; a recognition device 63 for recognizing the direction of a wiring pattern on the surface of the light source element 1; and a rotary mechanism which relatively rotates the light source element 1 with respect to the pedestal 2 so that the wiring pattern of the light source element 1 is directed in a prescribed direction.;COPYRIGHT: (C)2014,JPO&INPIT
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