Bolometer-type THz-wave detector

摘要

PROBLEM TO BE SOLVED: To provide a high-sensitivity bolometer type THz wave detector.;SOLUTION: The bolometer type THz wave detector has a thermal isolation structure in which a support part including electric wiring connected to a readout circuit formed on a substrate supports a temperature detection part including a bolometer thin film connected to the electric wiring and eaves formed extending inward and outward from a peripheral edge of the temperature detection part such that they float over the substrate. A reflection film is formed which has one or a plurality of holes in parts of the eaves formed extending inward from the peripheral edge of the temperature detection part among the eaves, and reflects a THz wave to a position on the substrate opposed to the temperature detection part, and an absorption film which absorbs the THz wave is formed on the eaves, the reflection film and absorption film forming an optical resonance structure.;COPYRIGHT: (C)2012,JPO&INPIT