Gas flow rate measuring device and a gas flow rate measurement method

摘要

Increase reliability by the real time measurement, only selected gas flow rate measuring device and the gas flow rate measurement method can measure the specific gas is disclosed. Of the mixed gas gas flow rate device that contains at least one gas is irradiated with light having a wavelength specific gas to be measured the flow velocity is absorbed to a specific gas, and detects the amount absorption of the corresponding wavelength of the specific gas includes a control unit for calculating the flow rate of the specific gas in real time to be measured based on the detection signal provided from at least one gas detector and gas detector provides a detection signal corresponding to the detected amount of light. It is not necessary additional calibrated by, if various kinds of gases are mixed, optionally the flow rate of the specific gas can be measured in real time.