Spacer transport container of the spacer, a method of transporting spacers, processing method, and a processing unit

摘要

PROBLEM TO BE SOLVED: To provide a spacer, a transportation container for a spacer, a transportation method for a spacer, a processing method, and a processing device, that enable automatic insertion of the spacer.;SOLUTION: A spacer S comprises notches Sa and Sb formed so as to have a part protruding from a peripheral part of two semiconductor wafers in a state that the semiconductor wafers are supported at the peripheral part so that their rear faces are opposed to each other. The notches Sa and Sb are formed so as to be housed in a space formed by an inner wall of a transportation container and an outer periphery of the spacer S in a state that the spacer S is housed in the transportation container for the spacer S.;COPYRIGHT: (C)2014,JPO&INPIT