首页> 外国专利> X-ray apparatus, a method, a method of manufacturing a structure, a recording medium recording the program and program

X-ray apparatus, a method, a method of manufacturing a structure, a recording medium recording the program and program

机译:X射线设备,方法,结构制造方法,记录程序的记录介质和程序

摘要

Provided is an x-ray device that can suppress detection error in relation to the inside of an object that contains various kinds of materials. Also provided are a method and a manufacturing method for a structure. The x-ray device irradiates a measurement object with x-rays and detects the transmitted x-rays that were transmitted through the measurement object, and is provided with an information processing unit (100) that in accordance with the ratio between a first material and a second material contained in the measurement object generates second detection information from first detection information obtained by the above detection. The information processing unit generates the second detection information from the first detection information in accordance with the ratio between the first material and the second material and the proportion of the x-rays that are transmitted through the first material and the second material, per unit surface area of a plane orthogonal to the incidence direction of the x-rays.
机译:本发明提供一种X射线装置,该X射线装置能够抑制关于包含各种材料的物体的内部的检测误差。还提供一种结构的方法和制造方法。 X射线设备用X射线照射测量对象并检测透射过测量对象的透射X射线,并且X射线设备设置有根据第一材料与第二材料之间的比率的信息处理单元(100)。测量对象中包含的第二材料从通过上述检测获得的第一检测信息中生成第二检测信息。信息处理单元根据第一材料和第二材料之间的比率以及通过第一材料和第二材料透射的x射线在单位表面上的比例,从第一检测信息中生成第二检测信息。与X射线的入射方向正交的平面的面积。

著录项

  • 公开/公告号JP5967108B2

    专利类型

  • 公开/公告日2016-08-10

    原文格式PDF

  • 申请/专利权人 株式会社ニコン;

    申请/专利号JP20130554361

  • 发明设计人 青木 貴史;

    申请日2013-01-18

  • 分类号G01N23/04;

  • 国家 JP

  • 入库时间 2022-08-21 14:41:18

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号