Optical wavefront compensation apparatus and optical wavefront compensation method

摘要

The optical wavefront compensation device includes: a wavefront modulation unit that modulates a wavefront of a light beam to generate a modulated light beam; a wavefront measurement unit that measures a wavefront of the modulated light beam; and a target wavefront that is a target of the wavefront of the modulated light beam. Target wavefront specifying means for specifying, and control means for controlling the wavefront modulation means so as to reduce the difference between the measurement result of the wavefront measuring means and the target wavefront, the target wavefront specifying means for changing the target wavefront The target wavefront is changed based on the reference information.