Electron microscope with a goniometer, and the goniometer stage

摘要

PROBLEM TO BE SOLVED: To provide a gonio stage which alleviates the characteristic vibration of a specimen holder as much as possible.;SOLUTION: The gonio stage has vibration control means for alleviating the characteristic vibration of a specimen holder. In a suitable embodiment of the gonio stage, the vibration control means is configured by a collet mechanism. In the suitable embodiment of the gonio stage, the collet mechanism clamps the specimen holder at the axial centroid position of the specimen holder. Also, the electron microscope of the present application has the gonio stage.;COPYRIGHT: (C)2013,JPO&INPIT