Non-contact transport apparatus using an upward flow formation body and this upward flow forming member

摘要

Providing an upward flow forming member and the like which can reduce the amplitude of the end portion of the transported material carried by preventing the occurrence of problems negative pressure, to increase the flying height. An annular flange portion a cylindrical base portion having a bottom with a cylindrical inner wall surface (6b) in [SOLUTION] and the internal surface (6c), protrude radially outward to the peripheral edge of the opening of the cylindrical body portion and (6d) the engagement of the engaging suspended portion of the plurality of downwardly extending in opposite and radially, along the circumferential direction of the outer peripheral edge of the annular flange portion and (6f), projecting outwardly at the lower end of the engaging suspended portion upward flow and a fluid jet holes one and (6j) at least if the protrusion and (6g), with an opening in the cylindrical inner wall from the outer peripheral surface of the cylindrical base portion, toward the center of the cylindrical base portion distal ends forming body (6), and the like. In one case, collide with the cylindrical inner wall of the cylindrical base portion, forming a rising flow to be distributed over the atomized fluid that is ejected from the fluid ejection holes, two fluid jet holes fluid jet holes For Tsu, the fluid collides with each other, fluid is ejected from the fluid jet holes to form a rising flow to be distributed over the atomized. [Selection Figure Figure 4