How to check the air-tightness of the air-tightness test equipment and test object

摘要

PROBLEM TO BE SOLVED: To provide a device and method which can be assembled in a manufacturing line, and can inspect the airtightness of an inspection object.;SOLUTION: The airtightness inspection device includes: a storage section 5 for storing an inspection object in a closed state from the outside; a detection section 6 for storing residual gas remaining in the storage part with the inspection object when the storage part is closed, and for detecting a leaking matter leaking from the inspection object that may be contained in the residual gas; and a suction section for sucking the residual gas from the storage part to the detection part. The storage part includes: a storage container 50 for storing the inspection object; an opening 51 opened in the storage container for storing the inspection object in the storage container; and a closing section 52 for storing the inspection object in the storage container from the opening for each inspection, and for closing the storage container.;COPYRIGHT: (C)2014,JPO&INPIT