Work conveying apparatus, as well as the work processing apparatus and work processing method

摘要

PROBLEM TO BE SOLVED: To provide a work transportation device, a work processing device, and a work processing method, capable of detecting a reference mark of a work without decreasing the diameter of a suction hole.SOLUTION: A suction hole 52 of a nozzle unit 50 allows an imaging device 70 to image a first reference mark 101 of the upper surface (sucked surface) of a work 100, and has a dimension and shape to be accommodated inside the outline of the upper surface of the work 100. A transparent body 53 is an end face that closes the other end (upper end )of a sucking tube 51. The transparent body 53 allows both maintenance of negative pressure inside the sucking tube 51 and light transmission of the imaging device 70. The imaging device 70 images at least two areas of the first reference mark 101 of the work 100. Here, the sucked surface of the work 100 held by the sucking hole 52 is imaged through the transparent body 53 and the sucking hole 52.