PROBLEM TO BE SOLVED: To provide a low vacuum soft X-ray experiment device which is capable of performing a soft X-ray irradiation experiment in a low vacuum region without destroying ultra high vacuum of a synchrotron, and is excellent in operability and visibility of a sample.;SOLUTION: In the low vacuum soft X-ray experiment device, in an experiment tank 8 which is connected through difference exhaust chambers (3, 5) with a radiation beam line 1 of the ultra high vacuum (Pbl1×10-7 Torr) and is kept in low vacuum (Pex1×10-2 Torr), an orifice of a final stage is installed at a distal end of a conical pipe 6. Also, the experiment tank 8 in which a sample 7 is arranged is constituted of a transparent member.;COPYRIGHT: (C)2013,JPO&INPIT
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