METHOD FOR SEQUENCING A PLURALITY OF TASKS PERFORMED BY A PROCESSING SYSTEM AND A PROCESSING SYSTEM FOR IMPLEMENTING THE SAME

摘要

A method for sequencing a plurality of tasks performed by a processing system and a processing system for implementing the same are disclosed herein. In one embodiment, a method for sequencing a plurality of tasks performed by a processing system is provided that includes generating a schedule by iteratively performing a scheduling process and processing a plurality of substrates using the plurality of semiconductor processing equipment stations according to the schedule. The scheduling process uses highly constrained tasks and determines whether a portion of the first list of the highly constrained tasks exceeds a capacity of the processing system. The scheduling process further includes updating the latest start time and the earliest start time associated with each of the plurality of tasks yet to be scheduled based on the assigned task.