PROCESS MAPPING OF TRANSIENT THERMAL RESPONSE DUE TO VALUE CHANGES IN A PROCESS VARIABLE

摘要

A method includes conducting a plurality of tests on process variables of a manufacturing process, with a test of the plurality of tests being associated with two combinations of process variables, the test having first values for a first combination of process variables at a first time and second values for a second combination of process variables at a second time, the test comprising: locally heating a region of a structure, wherein the local heating results in formation of a thermal field in the structure; assessing one or more thermal characteristics of the thermal field during a transition between the first combination of process variables and the second combination of process variables; and based on results of the plurality of tests, generating a process map of a transient response of the one or more thermal characteristics of the thermal field.