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SENSOR INTEGRATION WITH AN OUTGASSING BARRIER AND A STABLE ELECTRICAL SIGNAL PATH
SENSOR INTEGRATION WITH AN OUTGASSING BARRIER AND A STABLE ELECTRICAL SIGNAL PATH
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机译:传感器集成,具有超越障碍物和稳定的电信号路径
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摘要
The present disclosure relates to a structure and method of forming a MEMS-CMOS integrated circuit with an outgassing barrier and a stable electrical signal path. An additional poly or metal layer is embedded within the MEMS die to prevent outgassing from the CMOS die. Patterned conductors formed by a damascene process and a direct bonding between the two dies provide a stable electrical signal path.
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