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MONITORING SEMICONDUCTOR DEVICE, METHOD FOR PERFORMING DEEP N-TYPED WELL-CORRELATED (DNW-CORRELATED) ANTENNA RULE CHECK OF INTEGRATED CIRCUIT AND SEMICONDUCTOR STRUCTURE COMPLYING WITH DNW-CORRELATED ANTENNA RULE
MONITORING SEMICONDUCTOR DEVICE, METHOD FOR PERFORMING DEEP N-TYPED WELL-CORRELATED (DNW-CORRELATED) ANTENNA RULE CHECK OF INTEGRATED CIRCUIT AND SEMICONDUCTOR STRUCTURE COMPLYING WITH DNW-CORRELATED ANTENNA RULE
A semiconductor monitoring device includes a substrate, a die seal ring formed on the substrate, a deep n-typed well formed in the substrate under the die seal ring, and a monitoring device electrically connected to the die seal ring. The monitoring device is formed in a scribe line region defined on the substrate. A width of the deep n-typed well is larger than a width of the die seal ring.
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