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RESONANT CO2 SENSING WITH MITIGATION OF CROSS-SENSITIVITIES
RESONANT CO2 SENSING WITH MITIGATION OF CROSS-SENSITIVITIES
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机译:交叉敏感度降低的共振CO2感测
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摘要
Various exemplary embodiments relate to a device to measure carbon dioxide (CO2) levels, including a first oscillator group comprising a first sensor to measure air pressure, where the first sensor comprises a first sealed membrane, and where the first sealed membrane overlays a sealed first cavity; a second oscillator group including a second sensor to measure the resonance frequency of a second unsealed oscillating membrane, and where the second unsealed membrane overlays a second cavity in contact with the air outside of the second sensor; and a mixer accepting as input a first frequency measurement output from the first oscillator group and a second frequency measurement output from the second oscillator group, outputting the difference of the first frequency measurement and the second frequency measurement, and computing a carbon dioxide measurement based on the difference.
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