Atomic layer deposition inverted passivated surface acoustic wave sensor for early detection of biofilm growth

摘要

A surface acoustic wave (SAW) biofilm sensor includes a transmitting electric to acoustic wave transducer defining an upper surface and a lower surface, a receiving acoustic wave to electric transducer defining an upper surface and a lower surface, a piezoelectric film layer defining an upper surface and a lower surface, and a passivation film layer defining an upper surface and a lower surface. Portions of the lower surface of the piezoelectric film layer are disposed on the upper surface of the transmitting electric to acoustic wave transducer and on the upper surface of the receiving acoustic wave to electric transducer, and the lower surface of the passivation film layer is disposed on the upper surface of the piezoelectric film layer such that the upper surface of the passivation film layer is configured to enable contact with a biofilm.