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Decision tree construction for automatic classification of defects on semiconductor wafers
Decision tree construction for automatic classification of defects on semiconductor wafers
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机译:自动分类半导体晶圆上缺陷的决策树构造
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摘要
Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
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