Micro-electromechanical generator and electric apparatus using same

摘要

Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.