Charged-particle beam drawing apparatus and vibration damping mechanism

摘要

A charged-particle beam drawing apparatus has an airtight first elastic tube that is provided on an outer surface of the vacuum chamber and communicates with an inner space of the vacuum chamber, a vibrator that is airtight and provided at an end of the first elastic tube at an opposite side to the vacuum chamber, and communicates with an inner space of the first elastic tube, a second elastic tube that is airtight and provided at an end of the vibrator at an opposite side to the first elastic tube and communicates with an inner space of the vibrator, a terminal closer that is provided at an end of the second elastic tube at an opposite side to the vibrator, and closes the end of the second elastic tube, and a gap holder to keep a gap between the outer surface of the vacuum chamber and the terminal member.