A lower supporting pin module 22 is given a shape having a contact surface 26a. On the occasion of position recognition for determining a position of a pin on the lower supporting pin module 22, an image of the lower supporting pin module 22 is captured, and the image is subjected to recognition processing, to thus detect an outer shape of an upper shaft 24B. Even when an extraneous matter on a downside surface of a substrate adheres to the contact surface 26a, the position of the lower supporting pin module 22 can be stably recognized with superior recognition precision.
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机译：下支撑销模块 22 被赋予具有接触表面 26 a 的形状。在用于确定销在下支撑销模块 22 上的位置的位置识别时，捕获下支撑销模块 22 的图像，并且该图像进行识别处理，从而检测上轴 24 B的外形。即使基板下表面的异物附着在接触面 26 a 上，下支撑销模块 22 的位置可以以卓越的识别精度进行稳定识别。
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