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Electro-optic silicon modulator with alternative capacitance-loaded coplanar waveguide structures
Electro-optic silicon modulator with alternative capacitance-loaded coplanar waveguide structures
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机译:具有可选电容负载共面波导结构的电光硅调制器
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摘要
Embodiments of the present disclosure provide a high-speed silicon modulator without the microwave mode conversion and provide 50-ohm impedance matching to drivers simultaneously. In one aspect, a device may include an input waveguide region, an optic splitter, two optic phase shifters, an optic splitter, and an output waveguide. The device may include two curved waveguides. Either or both of the curved waveguides may have specially doped regions including PN junctions or MOS capacitors. The PN junctions or MOS capacitors may be alternatively connected to both slots of a coplanar waveguide forming the electrodes.
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