首页>
外国专利>
Fabry-perot interferometer with piezoelectric actuator contracting in radial direction on membrane
Fabry-perot interferometer with piezoelectric actuator contracting in radial direction on membrane
展开▼
机译:带压电致动器的法布里-珀罗干涉仪在膜片上径向收缩
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror (1), the element being mechanically coupled to a frame (4) with a bendable coupling (2A), wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.
展开▼