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Die-sized atomic magnetometer and method of forming the magnetometer
Die-sized atomic magnetometer and method of forming the magnetometer
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机译:模具尺寸的原子磁力计及其形成方法
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摘要
The cost and size of an atomic magnetometer are reduced by attaching together a first die which integrates together a vapor cell, top and side photo detectors, and processing electronics, a second die which integrates together an optics package and a heater for the vapor cell, and a third die which integrates together a VCSEL, a heater for the VCSEL, and control electronics.
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