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Ion generating apparatus and method of removing a fluorine compound deposited in a source housing thereof
Ion generating apparatus and method of removing a fluorine compound deposited in a source housing thereof
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机译:离子发生装置及其除去沉积在其源室中的氟化合物的方法
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摘要
Provided is an ion generating apparatus. The ion generating apparatus includes opposed electrodes connected to a high-frequency power supply, and hence, even in a case where a cathode filament is broken, hydride gas can be ionized to generate hydrogen ion. Thus, a fluorine compound deposited in a source housing is reduced in vacuum, and gas containing fluorine generated due to the above-mentioned reduction reaction is discharged with a vacuum pump.
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