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Positional change measurement device, positional change measurement method, and image forming apparatus

机译:位置变化测量装置,位置变化测量方法和图像形成装置

摘要

An objective is to achieve a positional change measurement device which measures positional change of a dynamic measured surface by using speckle patterns while easily reducing influence of fluctuations in a measurement environment temperature. Provided is a positional change measurement device including: a light source; an illuminating optical system configured to guide light from the light source to a measured surface; an imaging optical system; an image pickup device configured to acquire a speckle pattern by receiving reflection light from the measured surface via the imaging optical system; and detected-length compensation means for compensating for fluctuations in a detected length caused by temperature fluctuations. Positional change of the measured surface is measured based on a result of cross-correlation computation performed on multiple speckle patterns acquired at predetermined time intervals.
机译:目的是实现一种位置变化测量装置,该位置变化测量装置通过使用斑点图案来测量动态测量表面的位置变化,同时容易地减小测量环境温度的波动的影响。提供一种位置变化测量装置,包括:光源;照明光学系统,被配置为将来自光源的光引导至被测表面;成像光学系统;图像拾取装置,其被配置为通过经由成像光学系统从被测表面接收反射光来获取斑点图案;检测长度补偿装置,用于补偿由温度波动引起的检测长度的波动。基于对以预定时间间隔获取的多个斑点图案执行的互相关计算的结果,来测量被测表面的位置变化。

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