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Method for manufacturing organic EL element, organic EL element, organic EL display panel, organic EL display apparatus, and organic EL light-emitting apparatus
Method for manufacturing organic EL element, organic EL element, organic EL display panel, organic EL display apparatus, and organic EL light-emitting apparatus
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机译:有机EL元件的制造方法,有机EL元件,有机EL显示面板,有机EL显示装置及有机EL发光装置
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摘要
Method for manufacturing organic EL element, including: reducing internal pressure of vacuum chamber by vacuum pump connected thereto in state where substrate with applied film formed thereon is placed in vacuum chamber, applied film having been formed by applying material of organic light-emitting layer to substrate; and purifying applied film having passed through reducing the internal pressure of the vacuum chamber. Diphenylamine is used in portion of vacuum pump that is connected to inside of vacuum chamber. Reducing internal pressure of vacuum chamber is performed such that molecules of diphenylamine fly from vacuum pump into vacuum chamber and some of molecules are taken into applied film, and purifying is performed so that content of diphenylamine in applied film is in range from more than 0 nmol/cm3 to 13.8 nmol/cm3.
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机译:用于制造有机EL元件的方法,包括:在将其上形成有涂膜的基板放置在真空室中的状态下,通过与其连接的真空泵来降低真空室的内部压力;已经通过将有机发光层的材料施涂到基板上而形成涂膜。基质;并通过减小真空室的内部压力来净化所施加的膜。二苯胺用于连接到真空室内部的真空泵部分。降低真空室的内部压力,以使二苯胺分子从真空泵飞到真空室中,并将一些分子吸收到涂布膜中,并进行纯化,以使涂布膜中二苯胺的含量在大于0 nmol的范围内。 / cm 3 Sup>至13.8 nmol / cm 3 Sup>。
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