首页> 外国专利> Method for introducing an Automatic Liquid Chemicals Reagents with the air to a substrate in a closed Tank Chemical Vapor disposition, Cartridge and Method for preparing a dehumidification method to generate Protective Coatings

Method for introducing an Automatic Liquid Chemicals Reagents with the air to a substrate in a closed Tank Chemical Vapor disposition, Cartridge and Method for preparing a dehumidification method to generate Protective Coatings

机译:在封闭的罐式化学蒸气处理中将空气与液体化学自动试剂一起引入基材的方法,药筒以及制备保护性涂层的除湿方法的制备方法

摘要

A closed system of introduction of Chemical Agents used to deliver the active ingredients contained in a Liquid Chemical Agent disposal of Chemical Vapour Deposition includes a cartridge Box, dehumidified, containing a defined dose of liquid Chemical Agent Or. The cartridge is placed in a mounting Groove configured specifically for the cartridge.Once the first System, a Mechanical Drive Element linear fixed securely the cartridge into the Slot, while a Second extractor launches attached to a Mechanical Drive Element linear Pierces the cartridge from the Bottom, extracted the Chemical Agent li Liquid and supplied to a Vaporization Chamber.The House of Vaporization Evaporated liquid and delivers the Chemical Agent Vapors containing the active ingredients of the Chemical Vapor Deposition System.The provision of Chemical Vapour Deposition may include a Processing Chamber, a Conveyor, a clean Compressed Air System to provide separate compartments inside the treatment Chamber, a system of Moisture, a system and a system of Neut Chemical Vapor Position To Neutralize harmful products.
机译:用于输送化学蒸气沉积的液体化学药剂处置中包含的活性成分的化学药剂引入封闭系统包括除湿的药筒盒,其中装有确定剂量的液体化学药剂Or。盒式磁带被放置在专门为盒式磁带配置的安装槽中。一旦第一个系统将机械驱动元件线性地牢固地将盒式磁带固定到插槽中,而第二个提取器启动,则连接到机械式驱动元件线性地从底部刺穿盒式磁带提取化学试剂液体并供应到蒸发室。蒸发室蒸发的液体并输送包含化学气相沉积系统活性成分的化学试剂蒸汽。化学气相沉积的设施可能包括处理室,输送机,清洁的压缩空气系统(在处理室内提供单独的隔间),水分系统,中和化学蒸气位置系统以中和有害产品。

著录项

  • 公开/公告号AR096071A1

    专利类型

  • 公开/公告日2015-12-02

    原文格式PDF

  • 申请/专利权人 DIAMON FUSION INTERNATIONAL INC.;

    申请/专利号AR2014P101691

  • 发明设计人

    申请日2014-04-23

  • 分类号C23C16/448;

  • 国家 AR

  • 入库时间 2022-08-21 14:27:39

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