CMOS CHIP GAS SENSOR, AN ARRAY COMPRISING THE SENSOR AND A MANUFACTURING THEREOF

摘要

The present disclosure relates to a gas sensor. More particularly, the present disclosure provides a method of forming a gas sensor array with a suspended in-plane micro/nano heater which serves as a shadow mask to grow in-plane metal oxide film to bridge a nano gap metal electrode as a sensing film. The method uses top-down processing technique to form nanostructured sensor. The method involves steps of creating an in-plane heater for the gas sensor array. Next, different metal oxides are deposited on different array elements of the gas sensor array using shadow mask technique, with different angle of incidence for each of the different metal oxides to be deposited on array elements. The nano gap is created by electro migration technique to host the sensing element. Figure 5a